品牌
其他厂商性质
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YD-200 | YD-201 | YD-201D | YD-202 | YD-202D | |||
测量范围 INSPECTION SCOPE | 左右移动距离about the moving distance | ||||||
120mm | 125mm | ||||||
上下移动距离moving up and down a distance | |||||||
200mm | 340mm | ||||||
主轴精度 SPINDLE PRECISION | ± 0.0125μm(系统精度 system precision 0.03μm) | ||||||
平行度精度 PARALLEL PRECISION | 3μm/300mm | ||||||
回转工作台 SLEW WORKTSBLE | 外径diameten Φ162mm | 外径diameten Φ380mm | 外径diameten Φ260mm | ||||
水平调节范围 horizontal adjustmentrange: ± 2mm | |||||||
倾斜调节度 the digree of tilt adjustment: 1º | |||||||
承载重量 LOAD WORKTSBBLE | 25KG | 30KG | |||||
传感器SENSOR | 直线范围liear range : ±400μm | ||||||
测量力 measuring force : 70mN | |||||||
电源POWER | AC(220±10%) V 50Hz 500VA | ||||||
备注note | 气浮结构 Air floating Structure. 6r/min | 气浮结构 Air floating Structure. 6r/min | 非气浮结构 Non air floating Structure. 6r/min | 气浮结构 Air floating Structure. 6r/min | 非气浮结构 Non air floating Structure. 6r/min |