产品特性：

THS3型减振器使用万向球式设计的水平减振器，能够使固有频率更低，所以垂直和水平方向的减振性能更好。
将精密(士0.05mm)调平阀安置在减振器上，可达到较高的重复性精密度。
在THS3系列减振器均可配外置型油阻尼，搭载运动平台的设备稳定时间得以缩短，减振器刚性提升。




Product introduction

Multi-directional ball-type design makes the natural frequency of the vibration isolation system lower,thus results in better performance in both vertical and horizontal direction.

For better repeatability, precision leveling valves of 0.05mm should be installed.

THS3 series can be used with external oil damper, it will shorten the settling time of the moving platform and increase the stiffness of the system.

产品结构说明：

固有频率：垂直/水平=1.5-2Hz
10Hz减振率：90-99%
自动调整水平:是
调整水平重复性：1、标准调整精度±1.0mm  2、高精度调整精度±0.05mm

Isolation type: pneumatic
Natural frequency: horizontal/vertical =1.5-2Hz
Isolation performance: 90-99% at 10Hz
Automatic leveling: Yes

产品用途：

面板设备、光学设备、检测设备、半导体设备、医疗设备、航天设备、精密运动平台等。

The panel industry, optical equipment, testing equipment, semi-conductor equipment, medical equipment, aerospace and military equipment, precision moving platform.