Model | PR300 | PR301 |
Method | Barrel type of direct plasma |
Controlpart |
Highfrequency output | 300Wvariable (100W×3 chambers) |
Oscillating frequency | 13.56MHz |
Outputimpedance | 50Ω |
Tuningmethod | Manual biaxial tuning method |
Instrument | Output watt meter (0 to 300W) Reflected wave watt meter (0 to 100W) Vacuum gauge, bourdon's tube type Flow meter, needle valve integrated type, 1 set |
Timer | 0.1sec. to 999h |
Gasinlet | 1/4"stainless steel |
Powersource (50/60Hz) | AC100/220V, single phase, 1 kVA |
Reactionpart |
Reactionchamber | Made ofsuperhardglass, ø64×160mm×3 chanbers | Madeofpyrexglass, ø118×160mm |
Electrodestructure | Condenser type, 2-way split |
Controlsystem | Autopressure reduction, auto leak valve |
Pipingmaterial | Stailesssteel,Teflon, Copper and Brass | Stainlesssteel,Teflon |
Externaldimensions(W×D×Hmm) | 438×520×556 | 438×520×656 |
Weight | Approx.38kg | Approx. kg |
StandardAccessories |
| - Vacuum grease :1 container
- O-ring for reactionchamber:6pcs.
- Sample dish (large andsmall):each4sets
- Lid for reactionchamber:4sets
- Adapter for ground:1pc.
|
OptionalAccessories |
Sample dish(large) Sample dish (small) Sample shelf Stand |