| Model | IV600 | | Plasmamethod | RIE | | Electrodestructure | ForMagazinecorrespondence electrode structure | | RFgenerator | 100-600W | | Oscillatingfrequency | 13.56MHz | | Controlsystem | LCDtouchpanelwith PLC | | Chambersize | (W)230×(D)400×(H)200mm | | Chambermaterial | Aluminum | | Reactiongas | O2,Ar | | Purge gas | N2orDryair | | Flow meter | Mass flowcontrol2line | | Vacuumpump | 1000L/min | | Gas system | 2line(Reactiongas) , 1 line (Purge gas) | | Externaldimension | (W)1,000×(D)900×(H)970mm | | Powersupply | AC200/220/380V3phase 10A | |
