| Model | CV600 | | Plasmamode | RIE • DP | | Electrode | Parallelflatstage plate | | RFgeneratorpower | 100 - 600W | | Oscillating | 13.56MHz | | Controlsystem | Digitaldisplayａnd one touch control | | Chamber | (W) 310 x (D)220x (H) 140mm | | Electrodestage | (W) 230 x(D)140mm | | Chambermaterial | SUS | | Reactiongas | O2,Ar | | Purge gas | N2 orDryair | | Flow meter | Flow meter | | Vacuumpump | Vacuumpump(120L/min) | | Gas system | 2 line andpurgeline | | Externaldimensions | (W) 480 x (D)500x(H) 1,065mm | | Powersupply(50/60Hz) | AC200/220/380VThree phase 7A | |
