| Model | MPC600 | | Method | RIE •DPmode | | Electrode | Aluminumroundtype | | RFgenerator | 50 - 600W | | Oscillatingfrequency | 13.56MHz | | Controlsystem | Digitaldisplaywith one touch operation | | Chamber | Adapted for 6inchwafer | | Chambermaterial | SUS | | Reactiongas | O2,Ar,CF4 | | Purge gas | N2 orDryair | | Flow meter | Massflowcontrol | | Vacuumpump | 5000L/min | | Gas system | 2 line(Reactiongas) , 1 line (Purge) | | Externaldimension | (W)650 x (D)700x(H)1,480mm | | Powersupply | AC200/220/380V3phase 25A | |
